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Intelligent Thermopile-Based Vacuum Sensor

Authors
Journal
Procedia Engineering
1877-7058
Publisher
Elsevier
Publication Date
Volume
25
Identifiers
DOI: 10.1016/j.proeng.2011.12.143
Keywords
  • Vacuum Sensor
  • Intelligent Sensor
  • Thermopile
  • Pressure Measurement

Abstract

Abstract We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p +Si heater and two thermopiles with 30 p +Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors.

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