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Surface and interface analysis by nonresonant multiphoton ionization of sputtered neutrals

Authors
Journal
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
0168-583X
Publisher
Elsevier
Publication Date
Volume
33
Identifiers
DOI: 10.1016/0168-583x(88)90709-4

Abstract

Abstract The surface analysis by laser ionization (SALI) technique has unique advantages for mass spectrometric examination of materials, surfaces, and interfaces. Initial results from a second generation SALI instrument are presented to illustrate current capabilities of the technique when used to examine neutral atoms and molecules sputtered from inorganic materials by an at + probe beam. Results show good mass resolution, very high sensitivities, good quantitation capabilities, and excellent depth resolution at sharp interfaces.

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