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Beyond CMOS: heterogeneous integration of III-V devices, RF MEMS and other dissimilar materials/devices with Si CMOS to create intelligent microsystems.

Authors
Type
Published Article
Journal
Philosophical transactions. Series A, Mathematical, physical, and engineering sciences
Publication Date
Volume
372
Issue
2012
Pages
20130105–20130105
Identifiers
DOI: 10.1098/rsta.2013.0105
PMID: 24567473
Source
Medline
Keywords
  • Iii–V Devices
  • Si Cmos
  • Heterogeneous Integration
  • ‘System-On-A-Chip’

Abstract

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