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Diamond electro-mechanical micro devices — technology and performance

Authors
Journal
Diamond and Related Materials
0925-9635
Publisher
Elsevier
Publication Date
Volume
10
Identifiers
DOI: 10.1016/s0925-9635(01)00396-x
Keywords
  • Diamond
  • Chemical Vapour Deposition
  • Electro-Mechanical Micro Devices
Disciplines
  • Chemistry

Abstract

Abstract For Mikro Electro Mechanical System (MEMS) based on chemical vapour deposition (CVD) diamond many key steps in growth and processing have been developed and work reliably. Devices can be tailored depending on their specific application. Static and dynamic performance data become available as specifically discussed for the electromechanical microrelay. However, although steady progress is observed the variety of devices is still limited and a number of key elements still needs to be developed for systems including fully free moving parts.

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