Affordable Access

Publisher Website

Low power consumption micro C2H5OH gas sensor based on micro-heater and screen printing technique

Authors
Journal
Sensors and Actuators B Chemical
0925-4005
Publisher
Elsevier
Volume
187
Identifiers
DOI: 10.1016/j.snb.2013.05.002
Keywords
  • Gas Sensor
  • Sno2
  • Micro-Heater
  • Surface Micromachining
  • Alcohol

Abstract

Abstract Micro C2H5OH gas sensor based on micro-heater and tin oxide thick film was fabricated by using complementary metal-oxide semiconductor (CMOS) compatible micro electro mechanical systems (MEMS) process, which showed low power consumption and high response. Semiconducting SnO2 nano-powders were synthesized via co-precipitation method, and to increase the sensitivity for alcohol gas rare metal dopants were added. Bridge type micro-heater based on Si substrate was fabricated by surface micromachining technique and in the structure of micro-heater, the resistances of two semi-circled Pt heaters are connected to the spreader for thermal uniformity. The response of the micro gas sensor was 0.78 for 2ppm alcohol with lower power consumption (35mW) than that of the commercial alcohol gas sensor. The mechanical stability of the sensor was tested under the higher direct current (DC) power than that of the normal operation power and the variation rate of the micro-heater resistance was below 2% after 105 times repetitive 35mW pulse operations.

There are no comments yet on this publication. Be the first to share your thoughts.

Statistics

Seen <100 times
0 Comments

More articles like this

Low-power-Consumption metal oxide NO2 gas sensor b...

on Journal of Nanoscience and Nan... July 2012

Investigation of reliability and lifetime distribu...

on Solid-State Electronics Jan 01, 2003

A novel PVD technique for the preparation of SnO2t...

on Sensors and Actuators B Chemic... Jan 01, 1992

Investigation of a new In2O3-based selective H2gas...

on Materials Chemistry and Physic... Jan 01, 2005
More articles like this..