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Ion beam mixing of ceramic/metal interfaces

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
Publication Date
DOI: 10.1016/0168-583x(93)96099-x
  • Chemistry


Abstract In order to investigate the interplay between chemical and collisional effects during ion beam mixing of ceramic/metal interfaces, Ni 3N- and TiN-coated Al and AIN-coated Ni, Cr and Ti ( d ≈ 100 m) were irradiated with 500 keV Xe ions at 80 K. Rutherford backscattering spectrometry with 0.9–1.5 MeV α-particles and resonant nuclear reaction analysis via the reactions 15N(p,αγ) and 27Al(p,γ) were used to determine the interfacial atomic distributions prior to and after irradiation. The mixing rate of the AlN/metal systems agrees well with the predictions of the ballistic model, while mixing of Ni 3N/Al is clearly dominated by diffusion in a thermal spike. The slightly enhanced mixing in TiN/Al also hints at the contribution of a spike.

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