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Surface steps imaged by secondary electrons

Authors
Journal
Ultramicroscopy
0304-3991
Publisher
Elsevier
Publication Date
Volume
27
Issue
4
Identifiers
DOI: 10.1016/0304-3991(89)90012-0

Abstract

Abstract By combining reflection electron microscopy (REM) and secondary electron (SE) imaging on bulk GaAs samples it is shown that steps which are probably monatomic can be detected by SEs. The SE imaging can be implemented with incident electrons at higher angles than is normally possible with REM and this can be a great advantage when observing surfaces with high step densities. An example of this is given from the examination of a clean, bulk Cu sample.

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