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Electron Swarm Characteristics in Gas Mixtures Containing CF_4

IEEJ Transactions on Fundamentals and Materials
Institute Electrical Engineers Japan
Publication Date
  • Cf_4
  • 混合ガス
  • 相乗効果
  • ボルツマン方程式法
  • 電子衝突断面積
  • 427


The electron swarm characteristics in gas mixtures containing CF_4 has been analysed over the E/N range 0.01-566Td by a multi-term Boltzmann equation method and by a Monte Carlo simulation. The differences between CF_4 and Ar, and CF_4 and N_2 mixtures, in electron transport coefficients have been explained by the calculated electron energy distributions and the respective sets of electron collision cross-sections. The synergistic behaviour and the dielectric characteristics in these gas mixtures have been also shown and discussed in detail.

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