Abstract Homogeneous TiO 2 nanowires were fabricated by hydrothermal method. SEM pictures proved the yield of nanowires to be more than 90%. Composite humidity sensing films were made by using TiO 2 nanowires, TEOS and Nafion. FTIR absorption spectroscopy was used as a semi-quantitative method to get information about the protonation. The sensing films were prepared by a dip-coating method. The composite films coated on a pair of gold electrodes were tested for humidity sensors of resistance type. The measurement was carried out at five fixed humidity points in the range of 12–97% relative humidity, which were controlled by employing five different salt solutions. Resistance changes were about three orders of magnitude. The nanowires-based humidity sensors showed moderate sensitivity, short response and recovery time (<2 min) at relative humidity less than 76%, and good long-term stability.