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Simulation and verification of a piezoelectrically actuated diaphragm for check valve micropump design

Authors
Journal
Sensors and Actuators A Physical
0924-4247
Publisher
Elsevier
Publication Date
Volume
167
Issue
2
Identifiers
DOI: 10.1016/j.sna.2011.01.012
Keywords
  • Micropump
  • Piezoelectrically Actuated Diaphragm
  • Finite Element Analysis (Fea)
  • Average Displacement
  • Stroke Volume
  • Backpressure
Disciplines
  • Design

Abstract

Abstract This paper presents a design guideline for a piezoelectric actuated check valve diaphragm micropump for microfluidic applications. Diaphragm average displacement was adopted in analyzing a piezoelectrically actuated diaphragm. For the first time, the relationship between the stroke volume and backpressure of a check valve diaphragm micropump were simulated with a Finite Element Analysis (FEA) tool. The simulated results reasonably agreed to the experimental results of the micropump.

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