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Silicon thermal flow sensors

Authors
Journal
Sensors and Actuators A Physical
0924-4247
Publisher
Elsevier
Publication Date
Volume
30
Identifiers
DOI: 10.1016/0924-4247(92)80192-6
Disciplines
  • Design

Abstract

Abstract This paper discusses the design and application of silicon thermal flow sensors. It is shown how the transduction path in the complete measurement system, going from flow variable to electrical signal, results in three fundamental problems, which can be associated with, respectively, the mechanical, thermal and electrical signal domains. These aspects are further discussed in relation to the silicon flow-sensor research performed at the Electronic Instrumentation Laboratory.

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