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Feasibility test of spray-coating method for patterning of vapor phase-polymerized poly(3,4-ethylenedioxythiophene) thin film

Authors
Journal
Materials Research Bulletin
0025-5408
Publisher
Elsevier
Volume
57
Identifiers
DOI: 10.1016/j.materresbull.2014.05.039
Keywords
  • A. Poly (3
  • 4-Ethylenedioxythiophene)
  • A. Organic Electrode
  • A. Thin Film
  • B. Spray-Coating
  • B. Vapor Phase Polymerization

Abstract

Abstract In this study, spray-coating has been opted to prepare patterned Poly(3,4-ethylenedioxythiophene) (PEDOT) electrodes for an organic thin film transistor (OTFT). The conducting polymer was grown via the vapor phase polymerization (VPP) method. The film quality of VPP-PEDOT critically relies on the uniformity of oxidant film selectively patterned on a thermally oxidized Si-wafer surface prior to the polymerization. Therefore, to improve the uniformity of the oxidant film, this study tried to discover best conditions of spray-coating. Several different temperatures of Si-wafer substrate, distances from nozzle to wafer, and spray times were tested during the spray coating process. Then, sprayed oxidant films and vapor phase-polymerized PEDOT patterns were characterized by several thin film analyzing tools such as FE-SEM and optical microscope. The characterization found that the best conditions of spray coating are room temperature, 18cm, and 50s of substrate temperature, spray distance, and time, respectively.

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