Automatisierte Regelung der Waferumgebung - AUTOWEC Schlussbericht

Authors

• Gall, H.
• Hafner, M.
• IBM Deutschland G.m.b.H., Sindelfingen (...

Publication Date

Jan 01, 1995

Source

OpenGrey Repository

Keywords

• 20K - Solid-State Physics
• 09A - Components
• Wafer Environment
• Automation
• Automated Control
• Clean Room Technique
• Semiconductor Fabrication
• Standard Mechanical Interface

Language

German

License

Unknown

External links

• Full record on hdl.handle.net