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Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions

Authors
  • Van Dongen, Kaat;
  • Nye, Rachel AA;
  • Clerix, Jan-Willem J; 123751;
  • Sixt, Claudia;
  • De Simone, Danilo;
  • Delabie, Annelies; 7140;
Publication Date
May 01, 2023
Source
Lirias
Keywords
License
Unknown
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