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Accurate measurement of the out-of-plane motion of a tip-scanning atomic force microscope

Authors
  • Lee, Dong-Yeon1
  • Gweon, Dae-Gab2
  • 1 Yeungnam University, School of Mechanical Engineering, 214-1, Dae-dong, Gyeongsan-si, Gyeongsangbukdo, 712-749, Korea , Gyeongsangbukdo (South Korea)
  • 2 Korea Advanced Institute of Science and Technology, Department of Mechanical Engineering, 335 Gwahangno, Yuseong-Gu, Daejeon, 305-701, Korea , Daejeon (South Korea)
Type
Published Article
Journal
International Journal of Precision Engineering and Manufacturing
Publisher
Korean Society for Precision Engineering
Publication Date
Jan 01, 2009
Volume
10
Issue
1
Pages
119–121
Identifiers
DOI: 10.1007/s12541-009-0018-z
Source
Springer Nature
Keywords
License
Yellow

Abstract

A tip-scanning atomic force microscope (AFM) can be used as a highly accurate height-measuring instrument for large samples, such as liquid crystal displays. To accurately measure the flatness or surface roughness of large samples, the xy-scanner-induced out-of-plane motion must be known to discriminate scanner artifacts from the measured AFM images. As the topographic signals of AFM measurements contain the hysteresis of the z-scanner piezoelectric actuators, actual movements of the z-scanner were measured using a z-axis sensor glued to the actuator. The actual out-of-plane motion of the xy-scanner was found to be less than 1 nm for a 50-μm scan.

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