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Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

Authors
Journal
Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment
0168-9002
Publisher
Elsevier
Publication Date
Volume
645
Issue
1
Identifiers
DOI: 10.1016/j.nima.2010.12.200
Keywords
  • Electron–Gas Interactions
  • Monte Carlo Simulations
  • Signal Amplification
  • Analytical Models

Abstract

Abstract This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models.

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