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Optical apertureless fiber microprobe for surface laser modification of metal films with sub-100 nm resolution

Authors
Journal
Optics Communications
0030-4018
Publisher
Elsevier
Publication Date
Volume
308
Identifiers
DOI: 10.1016/j.optcom.2013.06.051
Keywords
  • Fiber Dielectric Probe
  • Laser Focusing
  • Diffraction Limit
  • Surface Laser Modification

Abstract

Abstract A simple apertureless dielectric microprobe in the form of a section of the tapered optical fiber was proposed for surface laser nanomodification. This probe enables surface λ/2-localization of laser beam, as shown both numerically and experimentally. Single nanoholes with the minimum size down to 90nm (∼λ/6) were fabricated in the 25-nm Au/Pd film, using this probe and a 532-nm pump nanosecond laser.

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