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A multiprocess machine tool for compound micromachining

International Journal of Machine Tools and Manufacture
Publication Date
DOI: 10.1016/j.ijmachtools.2009.10.007
  • Compound Micromachining
  • Process Development
  • On-Machine Measurement And Inspection
  • Ultra-Precision Machining


Abstract Compound micromachining is the most promising technology for the production of miniaturized parts and this technology is becoming increasingly more important and popular because of a growing demand for industrial products, with an increased number not only of functions but also of reduced dimensions, higher dimensional accuracy and better surface finish. Compound micromachining processes that combine multiple conventional and non-conventional micromachining processes have the capability to fabricate high aspect ratio microstructures with paramount dimensional accuracy. Such machining should be carried out on the same machine with minimum change of setups. At the same time, on-machine tool fabrication along with on-machine tool and workpiece measurement facilities should also be available for further enhancement of the functionality of the machine and higher productivity. In order to achieve effective implementation of compound micromachining techniques, this research seeks to address four important areas, namely (a) development of a machine tool capable of both conventional micromachining including microturning, micromilling, etc., and non-conventional micromachining including microelectrical discharge machining (micro-EDM), wire-cut electrical discharge machining (WEDM), etc.; (b) process control; (c) process development to achieve the necessary accuracy and quality and (d) on-machine measurement and inspection. An integrated effort into these areas has resulted in successful fabrication of microstructures that are able to meet the miniaturization demands of the industry. This paper presents a few tool-based approaches that integrate micro-EDM, micro-EDG, microturning and microgrinding to produce miniature components on the same machine tool platform in order to demonstrate the capabilities of compound micromachining.

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