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Mechanical Properties of MEMS Switches: Modeling and Characterization

Authors
Journal
Procedia Chemistry
1876-6196
Publisher
Elsevier
Publication Date
Volume
1
Issue
1
Identifiers
DOI: 10.1016/j.proche.2009.07.156
Keywords
  • Mems
  • Switch
  • Nanoindentation
  • Stiffness
  • Mechanical

Abstract

Abstract In this study, a nanoindentation technique is used to characterize the mechanical properties of RF MEMS series ohmic switches. We present the methodology, analytical models and test setup which allow to measure stiffness, gap heights and to evaluate contact forces. To validate this methodology, the nanoindentation of two types of RF MEMS switches, fabricated by CEA-LETI, is carried out. These data are fitted with an electro-mechanical model of the switch and are then compared with the results of electrical functional tests.

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