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Accelerator mass spectrometry at the University of North Texas

Authors
Journal
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
0168-583X
Publisher
Elsevier
Publication Date
Identifiers
DOI: 10.1016/0168-583x(89)90465-5
Disciplines
  • Design

Abstract

Abstract An accelerator mass spectrometry system designed for analysis of electronic materials is being developed and installed on the University of North Texas 3 MV tandem accelerator (National Electrostatics Corporation 9-SDH). High-resolution magnetic (40° deflection, M ΔM ≈ 350 , maximum mass-energy product 69 MeVu) and electro static (45 ° deflection, E/ q of 4.8 MeV, E ΔE ≈ 730 ) analysis, coupled with a 1.5 m time-of-flight path and total energy detection (surface barrier detector) forms the basis of the detection system. In order to provide stable element detection capability at the parts-per-trillion level in electronic materials (Si, GaAs, HgCdTe), a custom ion source, incorporating mass analysis of the sputtering beam, ultraclean slits, low cross-contamination and UHV capability, is being constructed.

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