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Carbon dust formation in a cold plasma from cathode sputtering

Authors
Journal
Journal of Nuclear Materials
0022-3115
Publisher
Elsevier
Publication Date
Identifiers
DOI: 10.1016/j.jnucmat.2009.01.148
Disciplines
  • Mathematics

Abstract

Abstract Nanoparticles are produced in argon glow plasmas where carbon is introduced by sputtering of a graphite cathode. A scaling law of growth is reported on as a function of the discharge time. Two successive stages of growth of concomitant agglomeration and carbon deposition are observed, followed by a final stage of growth by carbon deposition. A model of formation of molecular precursors by coagulation of neutral clusters on the one hand and of neutral-negative clusters on the other hand is presented, based on formation enthalpy and cluster geometry.

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