Germanium (Ge) has been widely used as the dopant in the core layer of planar glass waveguides to increase the refractive index because it gives a small propagation loss. Plasma enhanced chemical vapour deposition (PECVD) and flame hydrolysis deposition (FHD) are two main material deposition methods for waveguide components. For the first time to our best knowledge, this paper reports the formation of Ge nanoclusters in glass thin films deposited by using PECVD. Ge nanoclusters in glass have been demonstrated to have great potential for application to the nonlinear waveguide components. In this work we study the size and distribution of the nanoclusters by transmission electron microscopy (TEM) and Raman spectroscopy. The formation of the clusters is investigated by varying the Ge concentration in the glass and changing the annealing conditions such as temperature, atmosphere and time. The combined effect of a strong nonlinear glass material and a material platform that is well known from standard planar lightwave components makes this Ge nanoclusters material very promising for optical nonlinear waveguide components that are readily fabricated by using the same processing as standard waveguide components.