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The effects of vapour incidence on the microstructrure and related properties of condensed GeS2thin films

Authors
Journal
Vacuum
0042-207X
Publisher
Elsevier
Publication Date
Volume
53
Identifiers
DOI: 10.1016/s0042-207x(99)00107-4

Abstract

Abstract Thin films of amorphous GeS 2 are obtained by vacuum condensation at vapour incidence angles ranging between 0 and 80°. It is shown that in all cases the films are built up of individual columns. Further, it is demonstrated that the oblique deposition results in both column inclination and anisotropy in the shape of column cross section. A relationship between the film microstructure and microhardness, DC electrical conductivity and optical refraction coefficient is found.

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