Abstract Internally cooled X-ray optics, like X-ray monochromators and reflecting X-ray mirrors, play a crucial role in defining a beamlines resolution, degree of coherence and flux. A great effort is invested in the development of these optical components. An important aspect of the functionality of high heat load optics is its cooling and its influence on surface deformation. The authors present a study of two different geometrical cooling approaches. Its influence on beam inhomogeneity due to the strain from the manufacturing process is presented. X-ray topographic images and FWHM measurements are presented. FEA simulations of cooling efficiency and surface deformations were performed. The best achieved results are under an enlargement of 0.4μrad of the measured rocking curve.