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Properties of tantalum oxide thin film for solid electrolyte

Authors
Journal
Solid State Ionics
0167-2738
Publisher
Elsevier
Publication Date
Identifiers
DOI: 10.1016/0167-2738(90)90389-9

Abstract

Abstract Tantalum oxide thin films were prepared by RF ion-plating and RF sputtering. Protonic conductivities of the films varied from 10 −5 to 10 −10 S/cm with the condition of deposition. The high ionic conductive film has low packing density and shows strong O-H absorption. It was concluded that the adsorbed water gives much influence to the protonic conduction.

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