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The characterization of annealing in thin metal films using the Mayadas-Shatzkes theory

Authors
Journal
Thin Solid Films
0040-6090
Publisher
Elsevier
Publication Date
Volume
43
Issue
3
Identifiers
DOI: 10.1016/0040-6090(77)90297-8

Abstract

Abstract A technique suggested by Mola and Heras of analyzing thin film size effect data is used to characterize the structure of thin polycrystalline metal films. A linear least-squares analysis of the product of resistivity and thickness versus thickness allows a consistent determination of the size effect parameter α. Annealing studies (130–460 K) on gold films (120–1150 Å) yield temperature-independent values of the reflection coefficient both before and after annealing and allow the annealing to be characterized quantitatively.

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