Affordable Access

Publisher Website

Primary and transfer standards for vacuum and mass flow in an industrial calibration facility

Authors
Journal
Vacuum
0042-207X
Publisher
Elsevier
Publication Date
Volume
47
Identifiers
DOI: 10.1016/0042-207x(96)00012-7
Keywords
  • Part A: Vacuum Science I. Pressure Measurement And System Hardware

Abstract

Abstract The calibration of vacuum gauging and related gas flow instrumentation is of concern in a variety of settings, including the national standards laboratories, research laboratories, vacuum equipment manufacturing facilities and vacuum processing facilities. Here, a review is presented of the methodology and performance of standards for vacuum and mass flow suitable for a production environment. Special emphasis is placed on new techniques for primary and transfer standards which allow reasonable accuracy without requiring highly skilled operators. Such standards complement the state-of-the-art standards which are continually developed and improved at the national standards laboratories.

There are no comments yet on this publication. Be the first to share your thoughts.