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Noninterferometric differential confocal microscopy with 2-nm depth resolution

Authors
Journal
Optics Communications
0030-4018
Publisher
Elsevier
Publication Date
Volume
135
Identifiers
DOI: 10.1016/s0030-4018(96)00642-6
Keywords
  • Optical Information
  • Image Formation And Analysis
  • Optical Computing

Abstract

Abstract By utilizing the sharp slopes of the axial response curve of confocal imaging, we demonstrate a differential confocal technique for surface imaging with depth resolution as great as 2 nm. Neither servo feedback loop nor lock-in detection are used, hence measurements can be performed at high speed with long working distance. Because the technique uses no interferometric effects, it offers large open-loop dynamic range and is compatible with fluorescence microscopy.

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