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Optically driven microtools fabricated by UV lithography and RIE

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International Society for Optical Engineering
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Keywords
  • Diagnostik Og Behandling

Abstract

Optically driven microtools fabricated by UV lithography and RIE - DTU Orbit (19/04/14) Rodrigo PJ, Gammelgaard L, Bøggild P, Perch-Nielsen I, Glückstad J. Optically driven microtools fabricated by UV lithography and RIE. In Andrews DL, editor, Nanomanipulation with light 2. Bellingham: International Society for Optical Engineering. 2006. (SPIE Proceedings Series, 6131). Available from: 10.1117/12.646469

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