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Modelling requirements for development of an advanced Czochralski control system

Authors
Journal
Journal of Crystal Growth
0022-0248
Publisher
Elsevier
Publication Date
Volume
230
Identifiers
DOI: 10.1016/s0022-0248(01)01346-x
Keywords
  • A1. Computer Simulation
  • A1. Control System Design
  • A1. Growth Models
  • A1. Heat Transfer
  • A2. Czochralski Method
  • B2. Semiconducting Silicon

Abstract

Abstract A low order model is presented that captures important equipment and process characteristics for development of an advanced control system for Czochralski crystal growth. Analysis of experimental data sets reveals important control issues, leading to development of a new control structure. A model based performance comparison of the conventional and proposed control structure is presented.

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