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The determination of nitrogen in titanium nitride coatings using the nuclear reaction15N (p,αγ)12C

Authors
Journal
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
0168-583X
Publisher
Elsevier
Publication Date
Volume
35
Identifiers
DOI: 10.1016/0168-583x(88)90313-8
Disciplines
  • Chemistry

Abstract

Abstract Titanium nitride coatings are being used increasingly for various technological applications because of their outstanding mechanical and technical properties such as colour, chemical inertness and ultrahardness. A marked change in these properties was found when changing the nitrogen partial pressure during the growth process of the TiN coatings. Although 15N constitutes only 0.37% of natural nitrogen, the nitrogen content and distribution through the depths of various TiN layers were determined by using the nuclear reaction 15N(p, αγ 12C based on the resonance at 1.65 MeV. This allowed TiN coatings with thicknesses between 1 and 6.4 μm to be analyzed, attention being paid to the presence of the 1.21 and 1.98 MeV resonance peaks. Results showed that an increase in nitrogen partial pressure results in an increase in relative nitrogen content in the coatings.

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