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Micromachined corner cube reflectors as a communication link

Authors
Journal
Sensors and Actuators A Physical
0924-4247
Publisher
Elsevier
Publication Date
Volume
47
Identifiers
DOI: 10.1016/0924-4247(94)00966-l
Keywords
  • Corner Cube Reflectors

Abstract

Abstract This paper proposes using a micromachined corner cube reflector to transmit data digitally by modulating reflected light intensity. Corner cube reflectors ranging in size from 100 to 200 μm have been built using hinged polysilicon plates. The reflectivity of polysilicon has been measured to be 24% and the total reflected power from the corner cube has been measured to be between 1 to 2% of the incident power. Orthogonality between plates is within roughly 8 mrad. Reflection from individual polysilicon plates has been modulated using electrostatic actuation with an applied voltage as low as 8 V.

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