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A passive wireless integrated humidity sensor

Authors
Journal
Sensors and Actuators A Physical
0924-4247
Publisher
Elsevier
Publication Date
Volume
95
Identifiers
DOI: 10.1016/s0924-4247(01)00720-8
Keywords
  • Ihs
  • Polyimide
  • Relative Humidity

Abstract

Abstract This paper presents a single-chip integrated humidity sensor (IHS) capable of wireless operation through inductive coupling with a remote antenna. The 1.5 mm×0.5 mm×8 mm sensor chip consists of a planar electroplated copper coil (20 μm thick, 30 μm pitch, and 23 turns) and a silicon substrate separated by a 4100–5600 Å polyimide film. The resonant frequency of the IHS changes with humidity and the measured sensitivity ranges from 4 to 16 kHz/% RH. Measurements show a hysteresis of 4.5% RH over a range of 30–70% RH for a 5600 Å thick polyimide film IHS.

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