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Three-dimensional transient electrothermal simulation of electrostatic discharge protection circuits

Authors
Journal
Journal of Electrostatics
0304-3886
Publisher
Elsevier
Publication Date
Volume
36
Issue
1
Identifiers
DOI: 10.1016/0304-3886(95)00024-5
Keywords
  • Esd
  • 3D Simulations
  • Electro-Thermal
  • Transient
  • Protection

Abstract

Abstract Transient electrothermal simulation of ESD protection circuits using the 3-D finite element device simulator will be shown to explain the electrothermal physics in ESD protection circuits in 0.5 and 0.25 μm channel length CMOS technologies. Simulation, ESD and failure analysis will be compared for evaluation of correlation.

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