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The approximate factorization method for calculating the potential in a semiconductor structure

Authors
Journal
USSR Computational Mathematics and Mathematical Physics
0041-5553
Publisher
Elsevier
Publication Date
Volume
29
Issue
3
Identifiers
DOI: 10.1016/0041-5553(89)90166-3
Disciplines
  • Mathematics

Abstract

Abstract A modification of the approximate-factorization method is given for solving Poisson's equation that describes the distribution of electrostatic potential in a two-dimensional domain of the metal-dielectric-semiconductor type with complex geometry and deep profiles of the metal, oxide, and impurity.

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