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A review on techniques to fabricate silicon oxide arrays for biomolecules patterning

Authors
Journal
Superlattices and Microstructures
0749-6036
Publisher
Elsevier
Publication Date
Volume
49
Issue
6
Identifiers
DOI: 10.1016/j.spmi.2011.03.014
Keywords
  • Silicon Oxide
  • Patterning
  • Oxidation
  • Sam
  • Biochip
Disciplines
  • Biology
  • Chemistry

Abstract

Abstract The development of methods for pattern proteins and other functional molecules on the surfaces with nanoscale accuracy is indispensable to take advantage of their properties in ultrasensitive and/or high-density devices. Several methods are used to fabricate organized micro/nanohierarchical structures on a surface and give the ability of molecules to self-assemble by using the mutual recognition properties. However, the supramolecular organization is difficult to extend from nano- to mesoscopic length scales or does not allow accurate placement of the desired structures on a specific region of an inhomogeneous surface. This paper reviews the different techniques used to fabricate nano/millimeter range patterns on SiO 2/Si substrates and local chemical grafting to perform successful attachment of biomolecules on predetermined areas.

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