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Physics of reactive plasmas for material tailoring

Authors
Publisher
Elsevier B.V.
Publication Date
Volume
1
Issue
1
Identifiers
DOI: 10.1016/s1288-3255(99)80005-7
Keywords
  • Plasma
  • Reactive Plasma
  • Plasma Control
  • Plasma Processing
  • Materials Tailoring
Disciplines
  • Design

Abstract

Abstract Reactive plasmas, which can be used to manufacture highly functional composite materials and devices, have been discussed on the basis of plasma physics and gaseous electronics. To design plasma reactors suitable for specific processes, the relationship between control variables and plasma parameters has been discussed theoretically, and some methods for changing the parameters preferentially have been demonstrated.

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