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A high sensitivity surface-micromachined pressure sensor

Authors
Journal
Sensors and Actuators A Physical
0924-4247
Publisher
Elsevier
Publication Date
Volume
201
Identifiers
DOI: 10.1016/j.sna.2013.07.006
Keywords
  • Miniature Pressure Sensors
  • Surface Micromachining Technology
  • Soi Wafer
Disciplines
  • Design

Abstract

Abstract A high-sensitivity, surface-micromachined piezoresistive pressure sensor is proposed for size-demanding applications. The sensor design and theoretical analysis is presented. The sensor combines monocrystalline silicon piezoresistors and a polysilicon membrane. The sensor is fabricated using surface-micromachined technology, with an SOI wafer as the starting material. Two variations of the sensor are fabricated, tested, and characterized. The measured sensitivity is approximately 24mV(Vatm)−1, which is similar to that of traditional pressure sensors. The influence of design and technology factors on the sensor performance is discussed.

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