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Noise Depression of Parasitic Capacitance for Frequency Detection of Micromechanical Bulk Disk Resonator

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Abstract

A bulk disk resonator working in dynamic mode is used for mass detection. In the capacitive transduction scheme, the parasitic capacitance between the electrodes produces an anti resonance in the transmission curve, which distorts the phase shift at the resonant frequency and increases the frequency noise of the system. A capacitor cancellation circuit is used to subtract the parasitic capacitor. Measurements are conducted before and after the cancellation, and results show that after cancellation, the anti resonance is suppressed and the frequency noise is decreased, thus decreasing the minimal detectable mass of the sensor.

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