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Origin on amorphization of Co–Mo magnetic thin films: Experiments and thermodynamic calculation

Authors
Journal
Thin Solid Films
0040-6090
Publisher
Elsevier
Publication Date
Volume
517
Issue
9
Identifiers
DOI: 10.1016/j.tsf.2009.01.003
Keywords
  • Amorphisation
  • Co–Mo
  • Thin Films
  • Magnetic Properties
  • X-Ray Diffraction
  • Sputtering
Disciplines
  • Physics

Abstract

Abstract Amorphisation of Co–Mo magnetic thin films has been studied by using X-ray diffraction technique, and thermodynamic calculation based on Miedema's semi-empirical model has been used to clarify the nature of amorphisation in this binary alloy system. The transition composition from the hexagonal cubic packed structure to the amorphous (H/A) is about 19 at.%Mo when the Co–Mo thin films are deposited at room temperature (RT) under a working Ar pressure of 0.2 Pa and a deposition rate of about 0.7 Å/s, but increases up to about 23 at.%Mo when deposited at 300 °C. The calculated transition composition at RT based on the Miedema's model or the thermodynamically assessed parameters is 18.7 at.%Mo or 16.1 at.%Mo, respectively, well consistent with the experimental value of ~ 19.0 at.%Mo. Higher deposition rate and lower pressure shift the H/A transition composition to a higher Mo content.

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