# Physics-based large-signal sensitivity analysis of microwave circuits using technological parametric sensitivity from multidimensional semiconductor device models

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Physics-based Large-signal Sensitivity Analysis Of Microwave Circuits Using Technological Parametric - Microwave Theory and Techniques, IEEE Transactions on 846 IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL. 45, NO. 5, MAY 1997 Physics-Based Large-Signal Sensitivity Analysis of Microwave Circuits Using Technological Parametric Sensitivity from Multidimensional Semiconductor Device Models Fabrizio Bonani, Member, IEEE, Simona Donati Guerrieri, Fabio Filicori, Giovanni Ghione, Senior Member, IEEE, and Marco Pirola Abstract—The authors present an efficient approach to evaluate the large-signal (LS) parametric sensitivity of active semicon- ductor devices under quasi-periodic operation through accurate, multidimensional physics-based models. The proposed technique exploits efficient intermediate mathematical models to perform the link between physics-based analysis and circuit-oriented simu- lations, and only requires the evaluation of dc and ac small-signal (dc charge) sensitivities under general quasi-static conditions. To illustrate the technique, the authors discuss examples of sensitivity evaluation, statistical analysis, and doping profile opti- mization of an implanted MESFET to minimize intermodulation which make use of LS parametric sensitivities under two-tone excitation. Index Terms—Microwave devices, nonlinear circuits, optimiza- tion methods, semiconductor device modeling, sensitivity, yield estimation. I. INTRODUCTION THE PHYSICS-BASED design and optimization of mono-lithic microwave integrated circuits, (MMIC’s), has been the object of growing interest during the last few years [1]. The physics-based design approach is particularly appealing, since it makes direct use of physical and geometrical input data, rather than of intermediate electrical parameters, as the variables to be tuned during circuit optimization. In particular, yield-driven optimization, which is of paramount importance in designing marketable MMIC’s, is straightforward in the phy

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