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Very simple a-Si:H TFT fabrication process for LCD-TV application

Authors
Journal
Journal of Non-Crystalline Solids
0022-3093
Publisher
Elsevier
Publication Date
Identifiers
DOI: 10.1016/0022-3093(87)90071-8

Abstract

Abstract Amorphous silicon based thin film transistors for the driving of liquid crystal displays have been fabricated in a very simple way with only 2 photolithographic steps. The process for TFT and matrix elaboration are explained. The transistor electrical characteristics are shown to be compatible with LCD working conditions.

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