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Optical characterization of BaSm2Ti4O12thin films by spectroscopic ellipsometry

Authors
Journal
Thin Solid Films
0040-6090
Publisher
Elsevier
Publication Date
Volume
517
Issue
14
Identifiers
DOI: 10.1016/j.tsf.2009.01.102
Keywords
  • Ellipsometry
  • Dielectric Function
  • Basm2Ti4O12

Abstract

Abstract We performed spectroscopic ellipsometric measurement to characterize BaSm 2Ti 4O 12 (BST) thin films grown on Pt/Ti/SiO 2/c-Si substrate by rf magnetron sputtering. The six BST films were prepared at various deposition temperatures and thermal annealing times. The resulting refractive indices and extinction coefficients of the BST films show only slight change by the deposition temperature but a significant change after thermal annealing, implying the importance of the post annealing process. The increase of the refractive index can be understood by the higher density of the BST films caused by the crystallization after annealing process.

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