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Ti–B–C nanocomposite coatings deposited by magnetron sputtering

Authors
Journal
Applied Surface Science
0169-4332
Publisher
Elsevier
Publication Date
Volume
258
Issue
24
Identifiers
DOI: 10.1016/j.apsusc.2012.06.049
Keywords
  • Nanocrystalline
  • Electron Microscopy
  • Contact Resistance
  • B4C
  • Tic

Abstract

Abstract Ti–B–C nanocomposite coatings with a B content of 8–17at.% have been deposited by magnetron sputtering from B4C, Ti, and C targets. X-ray diffraction, photoelectron spectroscopy, and electron microscopy show that the coatings consist of nanocrystalline (nc) TiC:B embedded in a matrix of amorphous (a) C, BCx, TiOx and BOx. The fraction of amorphous phase scales with the Ti concentration, where the matrix predominantly consists of free C with some BCx in coatings with a C/Ti ratio>1, while the matrix predominantly consists of BCx with some free C in coatings with a C/Ti ratio<1. nc-TiC:B/a-BCx/a-C coatings with low amount of free C exhibit a contact resistance comparable to the contact resistance of an Ag sputtered coating at loads of ∼1N against an Au probe, despite the O content of ∼16at.%.

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