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Twin atom source reactor for studies of diamond film growth

Authors
Journal
Diamond and Related Materials
0925-9635
Publisher
Elsevier
Publication Date
Volume
5
Identifiers
DOI: 10.1016/0925-9635(95)00453-x
Keywords
  • Diamond Nucleation And Growth

Abstract

Abstract A new twin beam reactor is described for the study of the growth of diamond films. A heated substrate is simultaneously bombarded with characterized beams of thermal energy atomic hydrogen and carbon from separate sources, whose beam intensities can be varied independently. Preliminary results indicate the growth of a thin diamond film with a characteristic Raman spectrum.

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