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Analogy between electrical and structural properties of electron-beam-deposited SnO2

Authors
Journal
Thin Solid Films
0040-6090
Publisher
Elsevier
Publication Date
Volume
187
Issue
1
Identifiers
DOI: 10.1016/0040-6090(90)90121-s
Disciplines
  • Engineering

Abstract

Abstract The electrical properties of electron-beam-evaporated SnO 2 films were studied under various evaporation and annealing conditions. These electrical properties were explained by correlating them with the structural properties of films prepared under the same conditions. The long-term stability of these films was then studied under sensor operating conditions to determine the deposition conditions for gas sensor applications. From correlation of electrical and structural properties and long-term stability experiments, it was established that, because of their superior electrical and structural properties, the films deposited at 25 and 350 °C were more suitable for gas sensor applications than the films deposited at intermediate substrate temperatures.

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