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Inverted nanopyramid texturing for silicon solar cells using interference lithography

Authors
Journal
Microelectronic Engineering
0167-9317
Publisher
Elsevier
Publication Date
Volume
119
Identifiers
DOI: 10.1016/j.mee.2014.04.004
Keywords
  • Interference Lithography
  • Inverted Pyramid
  • Solar Cells
  • Sub-Wavelength Texturing
  • Light Trapping
  • Anti-Reflection

Abstract

Abstract We report on a maskless and scalable technique for fabricating nano-scale inverted pyramid structures suitable for light management in crystalline silicon solar cells. This technique utilizes interference lithography and subsequent combined dry and KOH wet pattern transfer etching techniques. The inverted nanopyramid structures suppress the total reflection at normal incidence to below 10% over the entire visible range. The overall efficiency of the solar cell has been increased by 67% with the inverted nanopyramid texturing. The standard dual MgF2/ZnS anti-reflection coating further enhanced the overall efficiency by 5.79%.

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