Abstract A pseudo-first principles technique for Auger quantitation was used to calculate relative Auger yields. These yields were compared to the experimental sensitivity factors found in the Handbook of Auger Electron Spectroscopy. In cases where pure element standards are readily available, theory agreed quite well with experiment 95% of the time. However, when pure element standards are not available, such as the lanthanide series and the light elements from Z = 7 to 12, large deviations exist. Plots of the calculated yields for 3, 5 and 10 kV primary beams are superimposed upon the Handbook sensitivity factor graphs and the reasons for the similarities and differences are discussed.