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Sub-ppm NO2sensors based on nanosized thin films of titanium-tungsten oxides

Authors
Journal
Sensors and Actuators B Chemical
0925-4005
Publisher
Elsevier
Publication Date
Volume
31
Identifiers
DOI: 10.1016/0925-4005(96)80021-9
Keywords
  • Titanium-Tungsten Oxide
  • Thin Film
  • No2Sensor
Disciplines
  • Ecology
  • Geography

Abstract

Abstract We describe the preparation of thin films of TiWO 3 obtained by means of r.f. sputtering deposition followed by a thermal oxidation. The sensing characteristics of these thin films were obtained by measuring the response towards NO 2 in the interval 0.5–20 ppm and to other interfering gases like ethyl alcohol, CH 4 and CO; the influence of water vapour to the response towards NO 2 was also investigated. The material seems to be a promising detector of NO 2 for environmental monitoring.

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