Abstract The fabrication of defined ceramic micropatterns smaller than 100 μm is due to the hardness and brittleness of ceramic materials still very challenging. However, in recent years, micropatterned ceramic surfaces have become highly interesting for biomedical applications or the fabrication of energy converting devices, such as solid oxide fuel or solar cells. In this study we evaluate six modern techniques for ceramic pattern fabrication with feature sizes ranging from 5 to 100 μm. Ceramic materials such as alumina, zirconia, silica and hydroxyapatite are discussed. Advantages and disadvantages for each process are highlighted and compared to the other techniques. Three of these techniques, namely microtransfer molding, modified micromolding and Aerosol-Jet ® printing generate patterns starting with aqueous ceramic suspensions. The other three techniques, micromachining and two different types of laser treatment produce micropatterns by material removal from solid ceramic substrates. The detailed analysis yields that properties such as the desired micropatterning size, shape or the production time are strongly dependant on the chosen technique.